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Electronic device manufacturing equipment
Panel Vapor deposition inspection
overview
overview
・ Inspection device for defective liquid crystal panel / OLED panel deposition
・ Presence / absence of abnormalities (foreign matter, film thickness, protrusions) after vapor deposition and pattern identification
・ Has many achievements as mass production equipment in Japan, China, and South Korea
feature
・ High-resolution inspection and high-speed review technology for micro defects (sub-micro class)
・ Uses Deep Learning technology
・ Realization of high stability by in-house control software
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