Electronic device manufacturing equipment

Panel Vapor deposition inspection

​overview

overview

・ Inspection device for defective liquid crystal panel / OLED panel deposition

・ Presence / absence of abnormalities (foreign matter, film thickness, protrusions) after vapor deposition and pattern identification

・ Has many achievements as mass production equipment in Japan, China, and South Korea

feature

・ High-resolution inspection and high-speed review technology for micro defects (sub-micro class)

・ Uses Deep Learning technology 

・ Realization of high stability by in-house control software