Panel Vapor deposition inspection
Thin-film deposition inspection machine

overview

・ LCD panel / OLED panel Defect inspection device.

・ Existence of abnormalities (foreign matter, film thickness, protrusions) after vapor deposition and

Identify the pattern.

・ Comparison of each abnormality with the reference data and adjacent areas

Judgment of pass / fail through comparison with.

・ High-resolution inspection Sub-micro-class inspection for micro defects

Technology.

・ Extraction of fatal defects using deep learning technology

And can be classified.

・ For various minute defects that occur in the process of forming complex circuits

High-speed review technology for.

・ Optical system development, especially for OLED panels

Optical system development technology specialized for flexible processes.

・ By using our own development control software

High stability.

・ Mass production equipment for domestic and overseas customers (Japan, China, South Korea)

As a result, there are many achievements.

* Please contact us for detailed structure and specifications .