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LLO (Laser lift-off) system
Laser lift-off device

レーザーリフトオフ装置(LLO).png

overview

・ Designed for flexible displays

Laser Lift-Off systems.

・ Carrier Glass is a laser,

Optical technology, process module

Use and separate thin film devices from the substrate

make.

・ For the manufacturing process of flexible displays

It is a core device in the world.

​feature

・ With a plastic material formed on a glass substrate

Excimer laser that separates a certain PI (polyimide)

(Excimer Laser) is used.

・ AMOLED and flexible OLED displays

Used in the process.

・ Annealing equipment changes a-Si to p-Si in the AMOLED process

Used to crystallize.

・ A film is formed on a glass substrate in the flexible OLED process.

Coated with PI (polyimide) to form

To separate the glass substrate by

used.

specification

・ Laser type: Excimer Laser

・ Stage type: Single or Stack Plane

・ Laser pulse: 1J, 2J

・ Laser wavelength: 308nm (XeCl)

・ Laser repetition rate: 600Hz

・ Software: Easy Cluster

* Please contact us for detailed structure and specifications.

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