LLO (Laser lift-off) system
Laser lift-off device
overview
・ Designed for flexible displays
Laser Lift-Off systems.
・ Carrier Glass is a laser,
Optical technology, process module
Use and separate thin film devices from the substrate
make.
・ For the manufacturing process of flexible displays
It is a core device in the world.
feature
・ With a plastic material formed on a glass substrate
Excimer laser that separates a certain PI (polyimide)
(Excimer Laser) is used.
・ AMOLED and flexible OLED displays
Used in the process.
・ Annealing equipment changes a-Si to p-Si in the AMOLED process
Used to crystallize.
・ A film is formed on a glass substrate in the flexible OLED process.
Coated with PI (polyimide) to form
To separate the glass substrate by
used.
specification
・ Laser type: Excimer Laser
・ Stage type: Single or Stack Plane
・ Laser pulse: 1J, 2J
・ Laser wavelength: 308nm (XeCl)
・ Laser repetition rate: 600Hz
・ Software: Easy Cluster
* Please contact us for detailed structure and specifications.